Contact-free test system for semiconductor device

A contact-free test system, comprising:

• a test signal member adapted to provide a standard wave pattern;
• an electronic beam generator to send a first electronic beam to an area of a semiconductor device;
• a detector to detect a second electronic beam, wherein the second electronic beam is a reflection of the first electronic beam from the semiconductor device;
• and
• a comparator to determine whether the semiconductor device is defective or not by comparing a wave pattern of the second electronic beam with a standard wave pattern provided by the test signal member.