Power supply unit for gas discharge processes

A method of providing a DC voltage to a gas discharge process, the method comprising:

• transforming a first DC voltage into a second DC voltage;
• and
• supplying the second DC voltage to a gas discharge process;
• wherein transforming a first DC voltage into the second DC voltage includes switching respective switching elements of at least two boost converters with a controlled pulse-duty factor in a temporally offset manner.

A plasma process DC voltage supply unit comprising:

• a first voltage transformation stage that transforms a first DC voltage into a second DC voltage;
• and
• a second voltage transformation stage that transforms the second DC voltage into an output DC voltage;
• the second voltage transformation stage including at least one boost converter with a switching element driven with a controlled pulse-duty factor.