Fin-type antifuse
AssigneeInternationall Business Machines Corporation
InventorsMathew Breitwisch, Chung Lam, Edward Nowak
Life of this patent
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Abstract
A method of forming an antifuse forms a material layer and then patterns the material layer into a fin. The center portion of the fin is converted into a substantially non-conductive region and the end portions of the fin into conductors. The process of converting the center portion of the fin into an insulator allows a process of heating the fin above a predetermined temperature to convert the insulator into a conductor. Thus, the fin-type structure that can be selectively converted from an insulator into a permanent conductor using a heating process.
Claims21
An antifuse structure comprising:
- a fin having a center portion and end portions,
- wherein said center portion of said fin comprises a substantially non-conductive region adapted to permanently become a conductor when heated above a predetermined temperature,
- wherein said end portions comprise conductors.
8-26. (canceled)
An antifuse structure comprising:
- a fin having a center portion and end portions, wherein said fin has a height and length that exceeds a width of said fin,
- wherein said center portion of said fin comprises a substantially non-conductive region adapted to permanently become a conductor when heated above a predetermined temperature, and
- wherein said end portions comprise conductors.
An antifuse structure comprising:
- a fin having a center portion and end portions, wherein said fin has a height and length tat exceed more than 2 times a width of said fin,
- wherein said center portion of said fin comprises a substantially non-conductive region adapted to permanently become a conductor when heated above a predetermined temperature, and
- wherein said end portions comprise conductors.
Dependencies are inferred from the claim text.