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US 2006/0076264 A1Published application
Reticle carrier
AssigneeFab Integrated Technology, Inc.
InventorBoyd CletusWittman
Life of this patent
Estimating the term…
Abstract
A reticle carrier has a cover. A gasket is attached to the cover. A door mates with the cover.
Claims20
A reticle carrier comprising:
- a cover;
- a gasket attached to the cover;
- and
- a door mating with the cover.
1 more element
A carrier for a reticle, comprising:
- a cover having a latch port;
- a latch having a tongue, the latch mating with the latch port;
- and
- a door having a flange that mates with the tongue of the latch.
1 more element
A reticle carrier, comprising:
- a cover made of an antistatic material;
- a door made of a conductive material;
- and
- a gasket attached to the cover and mating with the door.
1 more element
Dependencies are inferred from the claim text.