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AssigneeDanmarks Tekniske Universitet
InventorsAnja Boisen, Maria Nordstrom, Montserrat Calleja Gomez
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A cantilever array for use as a sensor, e.g. a bio/chemical sensor is disclosed. The cantilever array comprises a platform and a multitude of polymer-based cantilevers attached to the platform. Each of the cantilevers is coupled to an optical sensing means adapted to sense deformations of an individual cantilever. The cantilevers may be coated with a first and/or a second layer, the first layer being a metal layer, such as a gold layer, the second layer being a molecular layer capable of functioning as a receptor layer for molecular recognition. Further, two methods of fabricating a cantilever array are disclosed, one being based on photolithography, the other being based on micromoulding.
A cantilever array comprising a platform and at least two polymer-based cantilevers attached to the platform, and wherein each of the cantilevers is coupled to an optical sensing means adapted to sense deformations of an individual cantilever.
A method of fabricating a cantilever array comprising a platform and at least two polymer-based cantilevers attached to the platform, the method being a lithography process including the steps of spin-coating the polymer layer on a support and patterning the polymer layer to define the cantilevers, the lithographic process further including providing a first layer to the cantilevers, the first layer being a reflective layer.
A method of fabricating a cantilever array comprising a platform and at least two polymer-based cantilevers attached to the platform by a micromoulding technique where a polymer-based material is provided into a mould and pressed so as to obtain a polymer-based structure, and wherein a first layer is provided to the cantilevers, the first layer being a reflective layer.
Dependencies are inferred from the claim text.