MEMS switches with deforming membranes
AssigneeQUALCOMM MEMS Technologies, Inc.
InventorsClarence Chui, Manish Kothari
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Abstract
MEMS switches are formed with membranes or layers that are deformable upon the application of a voltage. In some embodiments, the application of a voltage opens switch contacts.
Claims57
A microelectromechanical systems (MEMS) switch comprising:
- at least first and second terminals;
- a first electrode;
- and
- a moveable element having at least a portion thereof forming a second electrode and being moveable in response to applied electric potentials between the second electrode and the first electrode, wherein the first and second terminals are selectively connectable depending on the position of said moveable element, and wherein a voltage below a threshold between the second and the first electrode causes the first and second terminals to be electrically connected.
A microelectromechanical systems (MEMS) switch comprising:
- a deformable electrically conductive membrane having first and second major surfaces;
- an electrode opposite said first major surface of said membrane;
- a first switch terminal movable with said deformable membrane;
- and
- a second switch terminal opposite said second major surface of said membrane such that membrane deformation toward said electrode in response to an applied electric field moves said first switch terminal and said second switch terminal farther apart.
A method of opening a microelectromechanical systems (MEMS) switch comprising disconnecting a first switch terminal from an established electrical coupling to a second switch terminal with an electric field.
A microelectromechanical systems (MEMS) switch comprising:
- a movable element comprising at least a first terminal and a first electrode on a first side of a gap;
- a second terminal;
- a second electrode on a second side of said gap configured to move said movable element based on a potential difference applied to said first and second electrodes to selectively connect said first and second terminals.
A microelectromechanical systems (MEMS) switch comprising an element movable between first and second positions comprising first and second movable terminals, wherein the first and second movable terminals cooperatively move with the movable element to connect the first and second movable terminals when the element is in the first position and to disconnect the first and second movable terminals when the element is in the second position.
A microelectromechanical systems (MEMS) switch comprising:
- first and second switch terminals;
- means for maintaining electrical contact between said first and second switch terminals when said MEMS switch is in a mechanically relaxed state;
- and
- means for disconnecting the first and second switch terminals by applying a voltage difference to the MEMS switch greater than a threshold.
A method of operating a microelectromechanical systems (MEMS) switch comprising:
- maintaining electrical contact between first and second switch terminals when said MEMS switch is in a mechanically relaxed state;
- and
- disconnecting the first and second switch terminals by creating an electric field between a pair of electrode surfaces of the MEMS switch.
A method of manufacturing a microelectromechanical systems (MEMS) switch comprising:
- forming an electrode and an insulator on a substrate;
- forming a first sacrificial layer over the insulator;
- forming a flexible layer within-plane tension;
- forming a first terminal over the flexible layer;
- forming a second sacrificial layer;
- forming a second terminal over the second sacrificial layer;
- forming an upper layer supporting the second terminal;
- and
- removing the first and second sacrificial layers.
A method of manufacturing a microelectromechanical systems (MEMS) switch comprising:
- forming an electrode, and an insulator on a substrate;
- forming a plate in a sacrificial layer over the insulator;
- forming a layer connected to the plate, wherein the layer or the plate, or both comprise one or more terminals;
- and
- removing the sacrificial layer.
A microelectromechanical systems (MEMS) switch comprising:
- a moveable element on a first side of a gap, the moveable element comprising a contact conductor and a first electrode;
- first and second fixed terminals on the first side of the gap;
- a second electrode on a second side of the gap configured to move the movable element based on a potential difference applied to the first and second electrodes to selectively connect the first and second terminals, wherein the first and second terminals are connected through said contact conductor when a potential difference less than a threshold is applied between said electrodes.
A microelectromechanical systems (MEMS) switch comprising:
- a substrate;
- a first electrode deposited on said substrate;
- a plurality of terminals;
- a flexible plate suspended over said electrode and said terminals by an upper support structure, wherein said flexible plate comprises a contact conductor and a second electrode.
Dependencies are inferred from the claim text.