Method and system for maintaining partial vacuum in display device

A microelectromechanical systems device, comprising:

• a transparent substrate;
• an interferometric modulator formed on the transparent substrate, wherein the interferometric modulator is configured to modulate light transmitted through the transparent substrate;
• a backplate sealed to the transparent substrate to form a package having a first cavity with at least a partial vacuum.

A method of fabricating a display device, comprising:

• providing a panel comprising a substrate joined to a backplate, wherein the substrate has an interferometric modulator formed thereon and encapsulated within the panel, wherein the interferometric modulator is configured to modulate light transmitted through the substrate;
• and
• reducing gas pressure within the panel.

A display device, comprising:

• a substrate configured to transmit light therethrough;
• a modulating means for modulating light transmitted through the substrate, wherein the modulating means is formed on the substrate and has a first cavity therein, wherein the cavity has a gas pressure less than atmospheric pressure;
• a backplate sealed to the substrate to form a package.