Wafer inspection with a customized reflective optical channel component
OwnerWinston Saunders, James Clarkeinventors
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Abstract
A method is described that adjusts the position of a item and sets a tilt angle for each of a plurality of micro-mirrors of a digital micro-mirror device. The setting of the tilt angles is to establish a filter within the optical channel of an inspection tool that inspects the item. The filter is to reduce noise received at an optical detection device. The tilt angle settings are a function of the position. The method also includes comparing information from the optical detection device that describes an inspected region of the item's surface against an expected version of the information.
Claims25
1-4. (canceled)
A machine readable medium comprising program code that when executed on a computing system's processing core cause said computing system to perform a method, said method comprising:
- adjusting the position of a item;
- setting a tilt angle for each of a plurality of micro-mirrors of a digital micro-mirror device to establish a filter within the optical channel of an inspection tool that inspects said item, said filter to reduce noise received at an optical detection device, said tilt angle settings being a function of said position;
- and,
- comparing information from said optical detection device that describes an inspected region of said item's surface against an expected version of said information.
A method, comprising:
- adjusting the position of a item;
- setting a tilt angle for each of a plurality of micro-mirrors of a digital micro-mirror device to establish a filter within the optical channel of an inspection tool that inspects said item, said filter to reduce noise received at an optical detection device, said tilt angle settings being a function of said position;
- and,
- comparing information from said optical detection device that describes an inspected region of said item's surface against an expected version of said information.
Dependencies are inferred from the claim text.