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US 2006/0066174 A1Published application
Electrostatic actuator and image pickup apparatus
OwnerToshikatsu Akiba, Yasuo Shima +1inventors
InventorsToshikatsu Akiba, Yasuo Shima, Masayuki Sekimura
Life of this patent
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Abstract
In an electrostatic actuator, stoppers are provided on a driving electrode substrate. Stoppers are provided so that when a first movable section moves in the direction in which a penetrating portion penetrates a stator frame, a gap is created between driving electrodes and a movable-section driving electrode, with the stoppers lying opposite stoppers. This makes it possible to reduce the possibility of destroying the electrostatic actuator even if the movable section is deformed.
Claims10
An electrostatic actuator comprising:
- a stator;
- a first and second substrates arranged in the stator so as to be faced each other, the second substrate being provided with first convex portions;
- a movable section guided in the stator so as to be movable in a predetermined direction, the movable section being provided with second convex portions which are faced to the first convex portions, respectively;
- a holding electrode provided on the first substrate to attract and hold the movable section;
- first electrodes provided on the second substrate at a first pitch in the predetermined direction;
- and
- second electrodes provided on the movable section at a second pitch in the predetermined direction, which is faced to the first electrodes so as to drive the movable section, the first and second convex portions forming a gap between the first electrodes and the second electrodes.
4 more elements
An image pickup apparatus comprising:
- a stator;
- a first and second substrates arranged in the stator so as to be faced each other, the second substrate being provided with first convex portions;
- a movable section guided in the stator so as to be movable in a predetermined direction, the movable section being provided with second convex portions which are faced to the first convex portions, respectively;
- a holding electrode provided on the first substrate to attract and hold the movable section;
- first electrodes provided on the second substrate at a first pitch in the predetermined direction;
- second electrodes provided on the movable section at a second pitch in the predetermined direction, which is faced to the first electrodes so as to drive the movable section, the first and second convex portions forming a gap between the first electrodes and the second electrodes;
- a lens provided in the movable section to transfer an image of a subject;
- and
- an image pickup device arranged to detect the image of the subject transferred from the lens.
6 more elements
Dependencies are inferred from the claim text.