Scanning microscope and method for scanning microscope
AssigneeLeica Microsystems CMS GmbH
InventorFrank Schreiber
Life of this patent
Estimating the term…
Abstract
A scanning microscope with a first and at least one other detection channel is disclosed. The first detection channel comprises at least one first detector and the other detection channel comprises at least one other detector to detect the detection light given off by a sample. A switching mechanism is provided that selectively directs the detection light into the first or into the other detection channel.
Claims41
Scanning microscope with a first and at least one other detection channel, whereby the first detection channel comprises at least one first detector and the other detection channel at least one other detector to detect detection light coming from a sample, characterized in that a switching mechanism is provided that selectively directs the detection light into the first and/or into the other detection channel.
Method for examining a sample with a scanning microscope, characterized by the following steps:
- generating an overview image of a sample;
- determining at least one region within the overview image;
- illuminating the sample with an illumination light;
- detecting the detection light coming from the sample, whereby the detection light given off by the region is directed into a first detection channel, and at least one portion of the remaining detection light is directed into another detection channel.
Dependencies are inferred from the claim text.