Supercritical fluid processing system having a coating on internal members and a method of using
OwnerDarko Babic, Carl White +1inventors
InventorsDarko Babic, Carl White, Alexei Sheydayi
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Abstract
A processing system utilizing a supercritical fluid for treating a substrate is described as having internal members having a coating. For example, the coating in internal members can reduce particulate contamination during processing. Additionally, a method for using the processing system is described.
Claims22
An internal member of a system for processing a substrate with a supercritical fluid, the member comprising:
- a structural element configured to be coupled to a high pressure processing system;
- a coating coupled to one or more surfaces of said structural element, and configured to reduce contamination released from the element into said supercritical fluid in said high pressure processing system.
A high pressure processing system for treating a substrate with a supercritical fluid, the system comprising:
- a processing chamber configured to treat said substrate with a high pressure fluid, introduced therein, having substantially supercritical fluid properties;
- a high pressure fluid supply system coupled to said processing chamber, and configured to introduce a high pressure fluid to said processing chamber;
- a process chemistry supply system coupled to said processing chamber, and configured to introduce a process chemistry to said processing chamber;
- a fluid flow system coupled to said processing chamber, and configured to circulate said high pressure fluid and said process chemistry through said processing chamber over said substrate;
- and
- a coating coupled to one or more surfaces of said processing chamber, said high pressure fluid supply system, said process chemistry supply system, or said recirculation system, or any combination thereof.
A high pressure processing system for treating a substrate comprising:
- a processing chamber configured to treat said substrate with a high pressure fluid, introduced therein, having substantially supercritical fluid properties;
- a carbon dioxide supply system coupled to said processing chamber, and configured to introduce carbon dioxide to said processing chamber;
- a process chemistry supply system coupled to said processing chamber, and configured to introduce a process chemistry to said processing chamber;
- a fluid flow system coupled to said high pressure processing system, and configured to flow supercritical carbon dioxide and said process chemistry through said processing chamber over said substrate;
- and
- a coating coupled to one or more surfaces of said processing chamber, said carbon dioxide supply system, said process chemistry supply system, or said fluid flow system, or any combination thereof.
A method for treating a substrate in a supercritical processing system comprising:
- disposing an internal member in said supercritical processing system having a coating on one or more surfaces configured to reduce contamination in said supercritical processing system, wherein said coating protects said internal member from process chemistry, supercritical fluid, or both in said supercritical processing system;
- disposing a substrate in said supercritical processing system;
- exposing said substrate to said supercritical fluid;
- and
- exposing said substrate to said processing chemistry.
Dependencies are inferred from the claim text.