Method and system for homogenization of supercritical fluid in a high pressure processing system
OwnerDarko Babic, Gentaro Goshiinventors
Life of this patent
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Abstract
A method and system for providing a homogeneous processing environment in a high pressure processing system is described. A high pressure fluid and a process chemistry are mixed in a pre-mixing system prior to exposure with the fluid in a supercritical state of a substrate in the high pressure processing system. For example, the pre-mixing system can include a fluid circulation system configured to bypass the high pressure processing system until the high pressure fluid and the process chemistry are mixed. Alternatively, the pre-mixing system can include a mixing chamber, and optionally include means for agitating the high pressure fluid and process chemistry in the mixing chamber.
Claims15
A high pressure processing system for treating a substrate comprising:
- a processing chamber configured to treat said substrate with a fluid, introduced therein, having substantially supercritical fluid properties;
- a high pressure fluid supply system configured to introduce a high pressure fluid to said processing chamber;
- a process chemistry supply system configured to introduce a process chemistry to said processing chamber;
- a pre-mixing system coupled to said processing chamber, and configured to receive said high pressure fluid from said high pressure fluid supply system and said process chemistry from said process chemistry supply system and mix said high pressure fluid and said process chemistry prior to introducing said high pressure fluid and said process chemistry to said processing chamber;
- and
- a fluid flow system coupled to said processing chamber, and configured to circulate said high pressure fluid and said process chemistry through said processing chamber over said substrate.
A method of processing a substrate in a high pressure processing system comprising:
- supplying a high pressure fluid for use in said high pressure processing system;
- supplying a process chemistry for use in said high pressure processing system;
- mixing said high pressure fluid and said process chemistry prior to introducing said high pressure fluid and said process chemistry to said high pressure processing system;
- introducing said high pressure fluid and said process chemistry to said high pressure processing system;
- and
- exposing said substrate to said high pressure fluid and said process chemistry in said high pressure processing system by bringing the fluid to a state having substantially supercritical fluid properties and exposing the substrate to the fluid in that state.
Dependencies are inferred from the claim text.