Ultratough CVD single crystal diamond and three dimensional growth thereof
AssigneeCarnegie Institution of Washington
InventorsRussell Hemley, Ho-kwang Mao, Chih-shiue Yan
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Abstract
The invention relates to a single-crystal diamond grown by microwave plasma chemical vapor deposition that has a toughness of at least about 30 MPa m1/2. The invention also relates to a method of producing a single-crystal diamond with a toughness of at least about 30 MPa m1/2. The invetnion further relates to a process for producing a single crystal CVD diamond in three dimensions on a single crystal diamond substrate.
Claims29
A single-crystal diamond grown by microwave plasma chemical vapor deposition that has a toughness of at least about 30 MPa m1/2.
A method for growing an ultratough, single-crystal diamond comprising:
- i) placing a seed diamond in a heat sink holder made of a material that has a high melting point and high thermal conductivity to minimize temperature gradients across the growth surface of the diamond;
- ii) controlling the temperature of a growth surface of the diamond such that the temperature of the growing diamond crystals is in the range of about 1050-1200° C.;
- and
- iii) growing single-crystal diamond by microwave plasma chemical vapor deposition on the growth surface of a diamond in a deposition chamber, wherein the atmosphere comprises a nitrogen to methane ratio of about 4% N2/CH4,
- iv) annealing the single-crystal diamond such that the annealed single-crystal diamond has a toughness of at least about 30 MPa m1/2.
A process for producing a single-crystal CVD diamond in three dimensions on a single crystal diamond substrate, comprising:
- i) growing single crystal diamond in a first <100> face of the single crystal diamond substrate;
- ii) repositioning the single crystal diamond substrate with the grown single crystal diamond thereon;
- and
- iii) growing single crystal diamond in a second <100> face of the single crystal diamond substrate.
Dependencies are inferred from the claim text.