Imprint apparatus and imprint method

An imprint apparatus comprising:

• a first press plate having a first press face on which a substrate to be transferred with a concave and convex pattern of a portion to be pressed is placed, the portion to be pressed having an imprint stamper formed on a surface thereof with the concave and convex pattern and the substrate;
• a second press plate having a second press face opposed to the first press face, which is arranged such that the second press face presses a face of the imprint stamper which is opposed from a face thereof on which the concave and convex pattern is formed;
• a pressure applying unit which applies a pressure on a face of the second press plate which is opposed from the second press face;
• a frame structure which has a second supporting member supporting the first press plate, a third supporting member supporting the pressure applying unit, and coupling members coupling respective both ends of the second supporting member and the third supporting member;
• a first member which is embedded in a region of the first press face on which the substrate is placed and which has a section equal to or smaller than a bottom face of the substrate and is made from material having a Young's modulus larger than that of the first press plate;
• and
• a second member which is embedded in a region of the second press face which presses the imprint stamper and which has a section equal to or smaller than the bottom face of the substrate and is made from material having a Young's modulus larger than that of the second press plate.

An imprint apparatus comprising:

• a first press plate having a first press face;
• a second press plate having a second press face opposed to the first press face;
• a pressure applying unit which applies a pressure on a face of the second press plate which is opposed from the second press face;
• a first supporting member which supports a face of the first press plate which is opposed from the first press face;
• a frame structure which has a second supporting member supporting the first supporting member, a third supporting member supporting the pressure applying unit, and coupling members coupling respective both ends of the second supporting member and the third supporting member;
• and
• a plurality of press portions which are provided between the first press face and the second press face, wherein
• each of the plurality of press portions comprises
• a third press plate having a third press face on which a substrate to be transferred with a concave and convex pattern of a portion to be pressed is placed, the portion to be pressed having an imprint stamper formed on a surface thereof with the concave and convex pattern and the substrate;
• a fourth press plate having a fourth press face opposed to the third press face, which is arranged such that the fourth press face presses a face of the imprint stamper which is opposed from a face thereof on which the concave and convex pattern is formed;
• a fourth supporting member which supports a face of the third press plate which is opposed from the third press face and has a section equal to or smaller than a bottom face of the substrate;
• and
• a first pressure receiving portion whose one end is fixed on a face of the fourth press plate which is opposed from the fourth press face and whose other end is fixed to the second press face, and which has a section equal to or smaller than a face of the imprint stamper which is opposed from a face thereof on which the concave and convex pattern is formed.