Apparatus and a method for forming an alloy layer over a substrate

Abstract

Embodiments of the invention involve introducing at least two metals into a chamber to form an alloy layer over a substrate. In one embodiment, at least two metals are mixed and introduced into a chamber containing a substrate and in which a focused ion beam contacts the two metals to form at least one alloy layer over the substrate. In another embodiment, at least two precursor gas sources are introduced into the chamber in which each precursor gas source contains a metal. The focused ion beam contacts the two precursor gases to form an alloy layer over the substrate. In yet another embodiment, a second metal layer is formed over a first metal layer to form a multi-metal layer. Thereafter, thermal treatment or introducing a focused ion beam to at least a portion of the multi-metal layer is performed to create at least one alloy layer over the substrate.

Dependencies are inferred from the claim text.