Method for forming polycrystalline silicon thin film transistor
AssigneeBoe Hydis Technology Co., Ltd.
InventorsKyoung Son, Myung Ryu, Jae Park, Eok Kim, Jun Lee, Se Kwon, Jang Im
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AssigneeBoe Hydis Technology Co., Ltd.
InventorsKyoung Son, Myung Ryu, Jae Park, Eok Kim, Jun Lee, Se Kwon, Jang Im
Estimating the term…
A method for forming a polycrystalline silicon thin film transistor. The method includes the steps of: forming a polycrystalline silicon layer including multiple protrusions by crystallizing the amorphous silicon layer according to a crystallization method in which the multiple protrusions are formed due to collision between crystal grains; patterning the polycrystalline silicon layer in an active pattern which includes only two protrusions of the multiple protrusions, which are apart from each other and located at both sides of a gate electrode-forming area; applying a barrier layer on the patterned polycrystalline silicon layer while partially covering the two protrusions; and forming a source electrode and a drain electrode at the protrusions of the polycrystalline silicon layer formed at both sides of the gate electrode-forming area by ion-implanting dopants into a resultant lamination.
A method for forming a polycrystalline silicon thin film transistor, comprising the steps of:
Dependencies are inferred from the claim text.