Microreactor and method of producing the same

A production method of a microreactor for obtaining hydrogen gas by reforming a feed material, characterized by comprising:

• a step of forming a microchannel portion on one surface of a metal substrate;
• a step of anodically oxidizing said metal substrate to form an insulating film in the form of a metal oxide film;
• a step of providing a heater on said metal oxide film on a surface, where said microchannel portion is not formed, of said metal substrate;
• a step of applying a catalyst to said microchannel portion;
• and
• a step of joining a cover member formed with a feed material inlet and a gas outlet to said metal substrate so as to cover said microchannel portion.

A production method of a microreactor for obtaining hydrogen gas by reforming a feed material, characterized by comprising:

• a step of forming a microchannel portion on one surface of a metal substrate;
• a step of providing an insulating film on a surface, where said microchannel portion is not formed, of said metal substrate;
• a step of providing a heater on said insulating film;
• a step of applying a catalyst to said microchannel portion;
• and
• a step of joining a cover member formed with a feed material inlet and a gas outlet to said metal substrate so as to cover said microchannel portion.

A production method of a microreactor for obtaining hydrogen gas by reforming a feed material, characterized by comprising:

• a step of forming, on one surface of each of a plurality of metal substrates, a microchannel portion and a through hole having an opening at a predetermined position of said microchannel portion;
• a step of anodically oxidizing said metal substrates to form insulating films each in the form of a metal oxide film;
• a step of providing a heater on said metal oxide film on a surface, where said microchannel portion is not formed, of at least one of said metal substrates;
• a step of applying catalysts to the microchannel portions of said plurality of metal substrates;
• a step of removing said metal oxide film at a portion subjected to joining when said plurality of metal substrates are stacked in multi-steps;
• and
• a step of joining together said plurality of metal substrates so as to be stacked in multi-steps such that the microchannel portions of said metal substrates communicate with each other via said through holes, and joining a cover member formed with a gas outlet to said metal substrate located at an outermost position of the multi-steps and exposing said microchannel portion.

A production method of a microreactor for obtaining hydrogen gas by reforming a feed material, characterized by comprising:

• a step of forming, on one surface of each of a plurality of metal substrates, a microchannel portion and a through hole having an opening at a predetermined position of said microchannel portion;
• a step of providing an insulating film on a surface, where said microchannel portion is not formed, of each of said metal substrates;
• a step of providing a heater on said insulating film of at least one of said metal substrates;
• a step of applying catalysts to the microchannel portions of said plurality of metal substrates;
• and
• a step of joining together said plurality of metal substrates so as to be stacked in multi-steps such that the microchannel portions of said metal substrates communicate with each other via said through holes, and joining a cover member formed with a gas outlet to said metal substrate located at an outermost position of the multi-steps and exposing said microchannel portion.

A production method of a microreactor for obtaining hydrogen gas by reforming a feed material, characterized by comprising:

• a channel portion forming step of forming a microchannel portion on one surface of a metal substrate;
• a joining step of joining a metal cover member having a feed material inlet and a gas outlet to said metal substrate so as to cover said microchannel portion to thereby form a joined body having a flow path;
• a surface processing step of forming a metal oxide film on an inner wall surface of said flow path;
• and
• a catalyst applying step of applying a catalyst to the inner wall surface of said flow path via said metal oxide film.

A production method of a microreactor for obtaining hydrogen gas by reforming a feed material, characterized by comprising:

• a channel portion forming step of forming microchannel portions with patterns that are plane-symmetrical with each other, on either surfaces of a pair of metal substrates;
• a joining step of joining together said pair of metal substrates so that said microchannel portions confront each other, to thereby form a joined body having a flow path;
• a surface processing step of forming a metal oxide film on an inner wall surface of said flow path;
• and
• a catalyst applying step of applying a catalyst to the inner wall surface of said flow path via said metal oxide film.

A microreactor for obtaining hydrogen gas by reforming a feed material, characterized by comprising:

• at least a plurality of unit flow path members each having a flow path inside, said flow path having one end portion serving as an inlet and the other end portion serving as an outlet, and a coupling member retaining said unit flow path members in a multi-step state,
• wherein said coupling member comprises a plurality of coupling portions for tightly retaining the unit flow path members at positions where the inlets of the unit flow path members are located and at positions where the outlets thereof are located, a feed material inlet, and a gas outlet,
• wherein at least one of said unit flow path members is a unit microreactor carrying a catalyst in said flow path, and
• wherein a feed material is introduced from the feed material inlet of said coupling member, and a predetermined reaction is carried out in said unit microreactor in said plurality of unit flow path members to thereby obtain desired produced gas from the gas outlet of said coupling member.

A production method of a microreactor for obtaining hydrogen gas by reforming a feed material, characterized by comprising:

• a step of forming a microchannel portion on one surface of a metal substrate;
• a step of anodically oxidizing said metal substrate to form an insulating film in the form of a metal oxide film;
• a step of applying a catalyst to said microchannel portion;
• a step of joining a cover member formed with a feed material inlet and a gas outlet to said metal substrate so as to cover said microchannel portion;
• and
• a step of providing a heater on said metal oxide film on a surface, where said microchannel portion is not formed, of said metal substrate.

A production method of a microreactor for obtaining hydrogen gas by reforming a feed material, characterized by comprising:

• a step of forming a microchannel portion on one surface of a metal substrate;
• a step of applying a catalyst to said microchannel portion;
• a step of joining a cover member formed with a feed material inlet and a gas outlet to said metal substrate so as to cover said microchannel portion;
• a step of providing an insulating film on a surface, where said microchannel portion is not formed, of said metal substrate;
• and
• a step of providing a heater on said insulating film.

A production method of a microreactor for obtaining hydrogen gas by reforming a feed material, characterized by comprising:

• a step of forming, on one surface of each of a plurality of metal substrates, a microchannel portion and a through hole having an opening at a predetermined position of said microchannel portion;
• a step of anodically oxidizing said metal substrates to form insulating films each in the form of a metal oxide film;
• a step of applying catalysts to the microchannel portions of said plurality of metal substrates;
• a step of removing said metal oxide film at a portion subjected to joining when said plurality of metal substrates are stacked in multi-steps;
• a step of joining together said plurality of metal substrates so as to be stacked in multi-steps such that the microchannel portions of said metal substrates communicate with each other via said through holes, and joining a cover member formed with a gas outlet to said metal substrate located at an outermost position of the multi-steps and exposing said microchannel portion;
• and
• a step of providing a heater on at least one of said metal oxide films located at an outermost position of the multi-steps.

A production method of a microreactor for obtaining hydrogen gas by reforming a feed material, characterized by comprising:

• a step of forming, on one surface of each of a plurality of metal substrates, a microchannel portion and a through hole having an opening at a predetermined position of said microchannel portion;
• a step of applying catalysts to the microchannel portions of said plurality of metal substrates;
• a step of joining together said plurality of metal substrates so as to be stacked in multi-steps such that the microchannel portions of said metal substrates communicate with each other via said through holes, and joining a cover member formed with a gas outlet to said metal substrate located at an outermost position of the multi-steps and exposing said microchannel portion;
• and
• a step of providing an insulating film on a surface of at least one of said metal substrates located at an outermost position of the multi-steps, and providing a heater on said insulating film.

A production method of a microreactor for obtaining hydrogen gas by reforming a feed material, characterized by comprising:

• a channel portion forming step of forming a microchannel portion on one surface of a metal substrate;
• a surface processing step of forming a metal oxide film on an inner wall surface of said microchannel portion;
• a joining step of joining a metal cover member having a feed material inlet and a gas outlet to said metal substrate so as to cover said microchannel portion to thereby form a joined body having a flow path;
• and
• a catalyst applying step of applying a catalyst to an inner wall surface of said flow path via said metal oxide film.

A production method of a microreactor for obtaining hydrogen gas by reforming a feed material, characterized by comprising:

• a channel portion forming step of forming microchannel portions with patterns that are plane-symmetrical with each other, on either surfaces of a pair of metal substrates;
• a surface processing step of forming a metal oxide film on an inner wall surface of each microchannel portion;
• a joining step of joining together said pair of metal substrates so that said microchannel portions confront each other, to thereby form a joined body having a flow path;
• and
• a catalyst applying step of applying a catalyst to an inner wall surface of said flow path via said metal. oxide film.