Method for manufacturing vertical cavity surface emitting laser and multiple wavelength surface emitting laser, vertical cavity surface emitting laser, multiple wavelength surface emitting laser, and optical communicating system
AssigneeFuji Xerox Co., Ltd.
InventorsTeiichi Suzuki, Daisuke Nagao, Takayuki Yamada, Yoshihisa Yamazaki
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Abstract
A method for manufacturing a vertical cavity surface emitting laser formed by laminating a plurality of layers on a substrate, includes coupling two layers of the plurality of layers by joining at room temperature or joining while heating.
Claims18
A method for manufacturing a vertical cavity surface emitting laser formed by laminating a plurality of layers on a substrate, the method comprising:
- coupling two layers of the plurality of layers by joining at room temperature or joining while heating.
A method for manufacturing a vertical cavity surface emitting laser, the method comprising:
- forming a DBR layer on a first substrate;
- forming a light emitting layer on the DBR layer, forming a wavelength selecting layer on a second substrate;
- pressing the first and second substrates each other to join the light emitting layer and the wavelength selecting layer;
- and
- separating the first substrate from the second substrates from each other to transfer the wavelength selecting layer from the second substrate into the first substrate.
A method for manufacturing a multiple wavelength surface emitting laser formed by laminating a plurality of layers on a substrate, the multiple wavelength surface emitting laser capable of emitting a plurality of laser beams having different wavelengths, the method comprising:
- coupling two layers of the plurality of layers by joining at room temperature or joining while heating.
A method for manufacturing a multiple wavelength surface emitting laser, the method comprising:
- forming a plurality of first DBR layers on a first substrate;
- forming a plurality of light emitting layers on the plurality of first DBR layers;
- forming a plurality of light wavelength selecting layers making wavelengths of light beams from the plurality of light emitting layers different, on a second substrate;
- pressing the first and second substrates each other to join the plurality of light emitting layers and the plurality of wavelength selecting layers;
- and
- separating the first substrate from the second substrates to transfer the plurality of wavelength selecting layers from the second substrate into the first substrate.
A multiple wavelength surface emitting laser, comprising:
- a substrate;
- a plurality of first DBR layers formed at predetermined intervals on the substrate;
- a plurality of light emitting layers formed on the plurality of first DBR layers;
- a plurality of annular spacers formed on the plurality of light emitting layers, the spacers having different thickness corresponding to different emission wavelengths, respectively;
- and
- a plurality of second DBR layers formed on the plurality of spacers.
An optical communication system comprising:
- a multiple wavelength surface emitting laser that emits a plurality of laser beams having different wavelengths, the laser comprising a plurality of layers laminated on a substrate, two layers of the plurality of layers coupled by joining at room temperature or joining while heating;
- and
- an optical transmission path that transmits the plurality of laser beams output from the multiple wavelength surface emitting laser.
Dependencies are inferred from the claim text.