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US 2006/0050414 A1Published application
Optical element/device mounting process and apparatus
AssigneeMems Optical, Inc.
InventorJohn Harchanko
Life of this patent
Estimating the term…
Abstract
A mounting process/device for mounting and alignment of micro optical electro-mechanical systems (MOEMS) elements and/or devices. The mounting process/device can be obtained by attaching at least one optical element onto a mounting system, which contains an embedded optical element. The attached optical element(s) are aligned with respect to the embedded optical element.
Claims23
A method of mounting optical devices, comprising:
- forming a mounting system, where the mounting system is formed by, etching substrate(s) to form a recess to receive a reference optical element, where the recess at least partially conforms to the shape of the reference optical element, attaching the reference optical element to the recess in the substrate, and etching the substrate(s) to expose the reference optical element and to create etched structures upon which optical devices can be attached;
- and
- attaching at least one optical device(s) to at least a portion of the etched structures.
A method of alignment and attachment of optical devices comprising:
- etching at least one recess into a first optical device, wherein the recess at least partially conforms to at least one reference optical element of a second optical device;
- and
- attaching and aligning the first optical device to the second optical device by attaching the reference optical element to said recess.
A multi-optical element device comprising.
- at least a reference optical element;
- a mounting system, wherein said mounting system is formed by etching substrate(s) to form a recess to receive a reference optical element, where said recess at least partially conforms to the shape of said reference optical element, and where said reference optical element is attached to said recess in said substrate, said mounting system contains etched substrate(s) forming etched structures upon which optical devices can be attached;
- and
- at least a first optical element attached to a predetermined structure of said etched structures.
1 more element
Dependencies are inferred from the claim text.