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US 2006/0050254 A1Published application
Projection exposure apparatus and method for producing a printed circuit board
AssigneeAdtec Engineering Co., Ltd.
InventorsWataru Nakagawa, Kazunori Hashimoto
Life of this patent
Estimating the term…
Abstract
A projection exposure apparatus and a method for producing a printed circuit board wherein, the whole pattern including pieces 10 and coupons 12 to be exposed on a print circuit board 2 is depicted on a photo mask 1 divided in six areas by divide line 19, the exposure will be made with respect to the each divided area of the photo mask 1 mounted on a movable photo mask stage 5 with using a masking device 3 masking other area than the exposing area.
Claims11
A projection exposure apparatus comprising:
- a light source for irradiating exposing light,
- a photo mask bigger than a irradiating area of said light source, depicted with a whole pattern to be exposed on a print circuit board as a exposing target,
- optics positioned between said photo mask and said board for exposing said pattern of the photo mask on said board with expansion or reduction at predetermined magnification,
- a photo mask moving device for positioning a certain area of said photo mask to said irradiating area of said irradiation light from said light source,
- a board moving device for positioning a certain area of said print circuit board to a exposing area on that said exposing light through said photo mask and said optics irradiates, wherein
- a pattern of said certain area of the photo mask is exposed by the light from said light source on said certain area of the printed circuit board.
3 more elements
A projection exposure method comprising the steps of:
- preparing a print circuit board as a exposing target and a photo mask bigger than an irradiating area of a light source for irradiating exposing light, depicted with a whole pattern to be exposed on said board,
- positioning a certain area of said photo mask by moving said photo mask to said irradiating area of said irradiation light from said light source,
- positioning a certain area of said print circuit board by moving said board to an exposing area where said exposing light irradiates through said photo mask,
- exposing said pattern of the photo mask on said board with expansion or reduction at predetermined magnification thorough optics after said positioning.
1 more element
Dependencies are inferred from the claim text.