Magnetic sensor for detecting location of short circuit between lead wires of high-density micro-patterns

Abstract

The present invention relates to a sensor, which detects the short circuit between high-density integrated lead wires formed on various boards, such as used in a flat panel display, in a non-contact manner, wherein an electric field is blocked by a conductor. According to the present invention, the present invention is advantageous in that it greatly improves detection performance and increases the capability to detect short circuit defects at the time of detecting a magnetic field when an electromotive force, caused by the induction of an electric field, is induced at a magnetic sensor, as in the case of a flat panel display, so that defects in metal patterns can be rapidly detected and corrected at an early stage of a manufacturing process, in cooperation with other defect testers, such as an external shape tester, thus remarkably reducing reworking costs.

Dependencies are inferred from the claim text.