Nickel/gold pad structure of semiconductor package and fabrication method thereof
AssigneeSiliconware Precision Industries Co., Ltd.
InventorsYu-Po Wang, Chiang-Cheng Chang, Chien-Te Chen
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AssigneeSiliconware Precision Industries Co., Ltd.
InventorsYu-Po Wang, Chiang-Cheng Chang, Chien-Te Chen
Estimating the term…
A nickel/gold (Ni/Au) pad structure of a semiconductor package and a fabrication method thereof are provided. The fabrication method includes preparing a core layer; forming a conductive trace layer on the core layer; patterning the conductive trace layer to form at least one pad of the conductive trace layer; applying a conductive layer; forming a photoresist layer to define a predetermined plating region on the pad, wherein the predetermined plating region is smaller in area than the pad; forming a Ni/Au layer on the predetermined plating region; removing the photoresist layer and etching away the conductive layer; and applying a solder mask layer and forming at least one opening in the solder mask layer to expose the pad, wherein the opening is larger in area than the Ni/Au layer. The Ni/Au pad structure fabricated by the above method can prevent a solder extrusion effect incurred in the conventional technology.
A nickel/gold (Ni/Au) pad structure of a semiconductor package, formed on a core layer of a substrate, the Ni/Au pad structure comprising:
A fabrication method of a Ni/Au pad structure of a semiconductor package, comprising the steps of:
A fabrication method of a Ni/Au pad structure of a semiconductor package, comprising the steps of:
Dependencies are inferred from the claim text.