CMOS image sensors and methods for fabricating the same
OwnerJoon Hwanginventor
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OwnerJoon Hwanginventor
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Complementary metal-oxide semiconductor (CMOS) image sensors and methods of fabricating the same are disclosed. In one example, the method includes forming at least a first pad layer and a second pad layer on a p-type semiconductor substrate having an active area and a device dividing area defined thereon, removing the first pad layer and the second pad layer on the device dividing area, so as to expose the p-type semiconductor layer and selectively removing the exposed p-type semiconductor layer, thereby forming a trench, forming a first p-type impurity area on a portion of the p-type semiconductor substrate formed on inner walls of the trench, forming a device dividing insulating layer on an entire surface of the p-type semiconductor substrate so as to fill the trench, removing the device dividing insulating layer, so that the device dividing insulating layer remains only in the trench, and removing the second pad layer, and injecting n-type impurity ions onto the active area, thereby forming a photodiode area.
A complementary metal-oxide semiconductor (CMOS) image sensor, comprising:
A complementary metal-oxide semiconductor (CMOS) image sensor, comprising:
A method for fabricating a complementary metal-oxide semiconductor (CMOS) image sensor, comprising:
Dependencies are inferred from the claim text.