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US 2006/0049367 A1Published application
Cooling apparatus, exposure apparatus, and device fabrication method
AssigneeCanon Kabushiki Kaisha
InventorHisashi Namba
Life of this patent
Estimating the term…
Abstract
An apparatus for adjusting temperature of an object includes a heat radiation member, a deflection member to deflect heat radiation from the heat radiation member toward a region of the object, and an adjusting system to adjust temperature of the heat radiation member.
Claims16
An apparatus for adjusting temperature of an object, said apparatus comprising:
- a heat radiation member;
- a deflection member to deflect heat radiation from said heat radiation member toward a region of the object;
- and
- an adjustment system to adjust temperature of said heat radiation member.
1 more element
Dependencies are inferred from the claim text.