Polishing composition and polishing method using the same
OwnerJunichi Hirano, Yasushi Matsunami +1inventors
InventorsJunichi Hirano, Yasushi Matsunami, Noritaka Yokomichi
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OwnerJunichi Hirano, Yasushi Matsunami +1inventors
InventorsJunichi Hirano, Yasushi Matsunami, Noritaka Yokomichi
Estimating the term…
A polishing composition includes an abrasive, at least one acid selected from the group consisting of orthophosphoric acid, diphosphoric acid, polyphosphoric acid, metaphosphoric acid, hexametaphosphoric acid, methyl acid phosphate, ethyl acid phosphate, ethyl glycol acid phosphate, isopropyl acid phosphate, phytic acid, and 1-hydroxyethylidene-1,1-diphosphonic acid; at least one salt selected from the group consisting of sodium salts, potassium salts, and lithium salts of an acid selected from orthophosphoric acid, diphosphoric acid, polyphosphoric acid, metaphosphoric acid, hexametaphosphoric acid, methyl acid phosphate, ethyl acid phosphate, ethyl glycol acid phosphate, isopropyl acid phosphate, phytic acid, and 1-hydroxyethylidene-1,1-diphosphonic acid; an oxidizing agent; and water.
A polishing composition comprising:
A method for polishing an object, the method comprising:
Dependencies are inferred from the claim text.