Multilayer nano imprint lithography
OwnerBabak Heidari, Marc Beckinventors
Life of this patent
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Abstract
An improved method for nanoimprint lithography and more specifically for providing a nano-scale pattern on a substrate is disclosed. According to the improvement, a mould (100) and a substrate (115) are provided wherein the substrate (115) is provided with a plurality of coating layers (120, 125, 130) before pressing the mould (100) and substrate (115) together for transferring a pattern from the mould (100) to the substrate (115). According to the invention, the substrate is provided with an uppermost layer (130) having a pure anti-adhesive function.
Claims13
1-10. (canceled)
A nanoimprint lithography method for providing a structured nano scale pattern on a substrate by transferring an inverse pattern from a mould to said substrate by pressing said mould and substrate together, said substrate being coated with a plurality of coating layers, comprising an imprint resist layer, said method comprising the step of providing an uppermost coating layer on top of the substrate having a pure anti-adhesive function before pressing.
A nanoimprint lithography method for providing a structured nano scale pattern on a substrate, comprising the steps of:
- providing a substrate having a substrate surface;
- providing a mould having a surface pattern to be transferred to the substrate surface;
- coating said substrate surface with an imprint resist layer;
- providing an uppermost coating layer on top of said substrate surface, having a pure anti-adhesive function;
- and
- pressing said mould and substrate together for imprinting said surface pattern into said imprint resist layer.
A substrate device for forming a nano scale pattern on said substrate by means of nanoimprint lithography, said substrate being coated with a plurality of coating layers, comprising an imprint resist layer, wherein an uppermost coating layer on top of the substrate is formed by a compound giving it a pure anti-adhesive function.
Dependencies are inferred from the claim text.