Method and apparatus for inspecting substrate pattern
AssigneeSamsung Electronics Co., Ltd.
InventorsKye-Weon Kim, Chung-Sam Jun, Ki-Suk Chung, Sang-Mun Chon, Seong-Jin Kim, Byung-Sug Lee, Yu-Sin Yang
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Abstract
A method of inspecting an inspection pattern using a statistical inference function is disclosed. The inference function is generated in relation to optical reference signal data and reference pattern characteristic data for a plurality of reference patterns formed by a unit process of interest on reference substrates.
Claims35
A method of inspecting an inspection pattern formed on an inspection substrate by a unit process, comprising:
- generating a statistical inference function corresponding to optical reference signal data and reference pattern characteristic data associated with a plurality of reference patterns formed on reference substrates by the unit process;
- obtaining optical reference signal data from inspection light reflected from the inspection pattern;
- calculating inspection pattern characteristic data from the optical reference signal data and the statistical inference function;
- and
- determining whether or not the calculated inspection pattern characteristic data falls within an allowable error tolerance range.
An apparatus for inspecting an inspection pattern formed on an inspection substrate by a unit process, comprising:
- a stage adapted to secure the inspection substrate;
- an irradiating member adapted to irradiate the inspection substrate with an inspection light;
- a detecting member adapted to detect inspection light reflected from the inspection substrate and generate optical reference signal data corresponding to the reflected inspection light;
- and
- an operating member adapted to determine whether a pattern defect is present in the inspection pattern by calculating inspection pattern characteristic data using a statistical inference function, wherein the statistical inference function corresponds to a relationship between the optical reference signal data and reference pattern characteristic data.
Dependencies are inferred from the claim text.