Inkjet print head with a high efficiency heater and a method of fabricating the same

A method of fabricating an inkjet print head, the method comprising:

• forming a passivation layer on a substrate;
• removing a portion of the passivation layer located where an ink-feed hole is to be located;
• forming a lower flow path layer constituting a lower portion of an ink chamber on the passivation layer;
• forming a heater support part in contact with an inner wall of the lower flow path layer;
• forming a heater and a lead on top surfaces of the passivation layer, the lower flow path layer, and the heater support part;
• forming an upper flow path layer constituting an upper portion of the ink chamber on the lower flow path layer;
• forming a second sacrificial layer having a thickness such that a top surface of the upper flow path layer is covered thereby;
• polishing the second sacrificial layer to expose the top surface of the upper flow path layer;
• forming a nozzle plate having a nozzle on the upper flow path layer and the second sacrificial layer;
• forming the ink-feed hole on a bottom surface of the substrate;
• and
• removing the second sacrificial layer and the heater support part.

A method of fabricating an inkjet printer head, the method comprising:

• forming a first layer of an ink flow structure on a substrate to define an inner wall of the ink flow structure;
• forming a sacrificial layer adjacent to the inner wall and having at least one surface that extends from a center region of the substrate to a top surface of the first layer;
• depositing a heater layer on the at least one surface of the sacrificial layer and a top surface of the first layer of the ink flow structure;
• forming a second layer of the ink flow structure on the first layer of the ink flow structure;
• forming a nozzle layer having at least one nozzle;
• and
• removing the sacrificial layer from underneath the heater layer.