MEMS switch electrode configuration to increase signal isolation

Abstract

A microelectromechanical system (MEMS) switch is provided which includes a moveable electrode with an opening arranged over at least a portion of the signal trace. In some cases, the opening may include a notch arranged along a periphery of the moveable electrode. In particular, the opening may include a notch bound by two edges of the moveable electrode which are respectively arranged relative to opposing sides of the signal trace. In other embodiments, the opening may include a hole arranged interior to the peripheral edge of the moveable electrode. In some cases, the MEMS switch may include a plurality of contact structures coupled to signal traces. In such cases, the moveable electrode may include openings specifically arranged above a plurality of the signal traces.

Dependencies are inferred from the claim text.