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US 2006/0038252 A1Published application
Reduced crosstalk sensor and method of formation
OwnerChandra Mouliinventor
Life of this patent
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Abstract
Isolation methods and devices for isolating regions of a semiconductor device are disclosed. The isolation methods and structures include forming an isolating trench among pixels or other active areas of a semiconductor device. The trench extends through the substrate to the base layer, wherein a liner may be deposited on the side walls of the trench. A conductive material is deposited into the trench to block electrons from passing through.
Claims13
1-36. (canceled)
A method of forming a structure for isolating areas in a semiconductor device, said method comprising:
- forming a trench having sidewalls in a substrate, said trench extending to a surface of a base layer below said substrate;
- and
- at least partially filling said trench with a conductive material.
Dependencies are inferred from the claim text.