Mirror process using tungsten passivation layer for preventing metal-spiking induced mirror bridging and improving mirror curvature

A mirror process, comprising the steps of:

• forming a first sacrificial layer overlying a substrate;
• forming a mirror structure overlying said first sacrificial layer, wherein said mirror structure comprises a reflective layer sandwiched between a first barrier layer and a second barrier layer;
• forming a tungsten passivation layer overlying said mirror structure and said first sacrificial layer, wherein said tungsten passivation layer is blanket deposited to cover the top and sidewalls of said mirror structure;
• forming a second sacrificial layer overlying said tungsten passivation layer;
• and
• removing said second sacrificial layer, said tungsten passivation layer and said first sacrificial layer simultaneously.