Temperature control assembly for use in etching processes and an associated retrofit method

A method for retrofitting a temperature control assembly, comprising:

• removing an original cooling mechanism from a temperature control assembly, the temperature control assembly comprising a housing and wherein the housing comprises:
• an aperture generally disposed along a center axis of the housing;
• a first side disposed between the aperture and an outside edge of the housing and including a surface generally perpendicular to the center axis;
• a channel disposed through the surface;
• a second side disposed between the aperture and the outside edge and having a reflective appearance;
• a plurality of sockets disposed between the surface and the second side and formed to accept a plurality of heating elements;
• and
• a flange disposed along the first side and having a plurality of first holes arranged substantially to align the temperature control assembly for use in an etching process chamber assembly and to position the second side to face toward a process chamber of the etching process chamber assembly;
• creating a plurality of cavities in the surface adjacent to the channel;
• drilling and tapping a plurality of second holes in the plurality of cavities;
• creating a groove disposed along the first side;
• drilling and tapping a plurality of third holes in the first side adjacent to the groove;
• selecting a retrofit cooling conduit formed from a non-corrosive metallic material;
• disposing the retrofit cooling conduit along the groove and within the channel;
• coupling a plurality of fasteners to the housing using the second holes and the third holes to associate the retrofit cooling conduit with the housing such that the fasteners do not extend past the surface;
• selecting a retrofit mounting block;
• and
• coupling the retrofit mounting block to the retrofit cooling conduit.