Systems and methods for processing microfeature workpieces
AssigneeMicron Technology, Inc.
InventorTimothy Kennedy
Life of this patent
Estimating the term…
Abstract
Systems and methods for processing microfeature workpieces are disclosed herein. In one embodiment, the system comprises a processing chamber having a workpiece processing site configured to receive a microfeature workpiece and a main inlet through which a processing fluid can flow into the processing chamber. The system further comprises a plate in the processing chamber between the main inlet and the workpiece processing site. The plate has a first side generally facing the main inlet and a second side opposite the first side. The plate further includes a plurality of passageways extending from the first side of the plate to the second side. The individual passageways include an inlet portion projecting from the first side of the plate by a separation distance.
Claims60
A system for processing microfeature workpieces, comprising:
- a processing chamber having a workpiece processing site configured to receive a microfeature workpiece;
- a main inlet through which a processing fluid can flow into the processing chamber;
- a plate in the processing chamber between the main inlet and the workpiece processing site, the plate having a first side generally facing the main inlet and a second side opposite the first side;
- and
- a plurality of passageways extending from the first side of the plate to the second side, the individual passageways including an inlet portion projecting from the first side of the plate to space inlet openings apart from the first side of the plate.
A system for processing microfeature workpieces, comprising:
- a processing chamber including a sidewall and an interior having a processing site for receiving a microfeature workpiece;
- a conduit in the processing chamber, the conduit having a plurality of nozzles arranged to deliver a flow of processing fluid toward the processing site;
- a plate for conditioning the flow of processing fluid, the plate being between the conduit and the microfeature workpiece, the plate having a first side with a generally V-shaped cross-sectional profile generally facing the conduit and a second side opposite the first side;
- and
- a plurality of vias extending through the plate from the first side to the second side, the individual vias having an inlet portion projecting from the first side of the plate.
A system for processing microfeature workpieces, comprising:
- a processing chamber having a workpiece processing site configured to receive a microfeature workpiece;
- a main inlet through which a processing fluid can flow into the processing chamber;
- and
- a flow diffuser plate between the main inlet and the workpiece processing site and positioned generally transverse to a processing fluid flow path, the diffuser plate having a first side generally facing the main inlet, a second side opposite the first side, and a plurality of vias extending from the first side to the second side, the individual vias including a raised feature projecting upstream in the flow path relative to the first side of the flow diffuser plate and an inlet orifice at an upstream end of the raised feature.
A flow conditioning member for use in a system for processing microfeature workpieces, the system including a processing chamber having an inner vessel in which a microfeature workpiece can be immersed in a processing fluid, the flow conditioning member comprising:
- a plate having a first side and a second side opposite the first side, wherein the first side of the plate is configured to face toward a main inlet of the processing chamber, and wherein the plate is configured to be positioned transverse to a flow of processing fluid within the chamber;
- and
- a plurality of vias extending through the plate from the first side to the second side, the individual vias having an inlet portion projecting from the first side of the plate and inlet openings spaced apart from the first side.
A system for processing microfeature workpieces, comprising:
- a processing chamber having a workpiece processing site configured to receive a microfeature workpiece;
- a main inlet for delivering a processing fluid to the processing site;
- and
- flow conditioning means between the main inlet and the workpiece processing site and positioned generally transverse to a processing fluid flow path, the flow conditioning means having a first side generally facing the main inlet, a second side opposite the first side, and a plurality of passageways extending from the first side to the second side, the individual passageways including bubble dispersion means projecting from the first side of the flow conditioning means.
A system for processing workpieces, comprising:
- a processing chamber having a workpiece processing site configured to receive a workpiece;
- a main inlet through which a processing fluid can flow into the processing chamber;
- a plate in the processing chamber between the main inlet and the workpiece processing site, the plate having a first side generally facing the main inlet and a second side opposite the first side;
- and
- a plurality of passageways extending from the first side of the plate to the second side, the individual passageways including an inlet portion projecting from the first side of the plate to space inlet openings apart from the first side of the plate.
A method of processing a microfeature workpiece, comprising:
- positioning a microfeature workpiece in a processing chamber;
- directing a processing fluid toward a diffuser plate in the chamber;
- and
- obstructing bubbles from passing through passageways in the diffuser plate before the processing fluid contacts the microfeature workpiece.
A method of processing a microfeature workpiece, comprising:
- positioning a microfeature workpiece in a processing chamber;
- delivering a processing fluid to the chamber through a main inlet to form a flow of processing fluid directed to a flow conditioning plate having passageways;
- and
- preventing bubbles from passing through the passageways in the flow conditioning plate by spacing inlet orifices of the passageways apart from an inclined bottom surface of the flow conditioning plate.
A method of processing a microfeature workpiece, comprising:
- positioning a microfeature workpiece in a processing chamber;
- positioning a flow diffuser plate in the processing chamber between the workpiece and a conduit having a plurality of nozzles aligned with at least a portion of the workpiece, the flow diffuser plate having a first side with a generally V-shaped cross-sectional profile generally facing the conduit, a second side opposite the first side, and a plurality of passageways extending through the plate;
- delivering a processing fluid to the interior of the chamber through the plurality of nozzles aligned with at least a portion of the workpiece;
- and
- inhibiting bubbles from passing through passageways in the flow diffuser plate by flowing the processing fluid through the plurality of passageways extending through the plate, the individual passageways including an inlet portion projecting upstream in the flow of processing fluid relative to the first side of the flow diffuser plate and an inlet orifice at an upstream end of the inlet portion.
A method of processing a workpiece, comprising:
- positioning a workpiece in a processing chamber;
- directing a processing fluid toward a diffuser plate in the chamber;
- and
- obstructing bubbles from passing through passageways in the diffuser plate before the processing fluid contacts the workpiece.
Dependencies are inferred from the claim text.