Delivery system
AssigneeRohm and Haas Electronic Materials LLC
InventorsEgbert Woelk, Deodatta Shenai-Khatkhate, Ronald Dicarlo
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Abstract
Systems for delivering solid organometallic compounds in the vapor phase to reactors are provided. Such systems include a dual-chambered cylinder design for use with a frit of solid organometallic source material for chemical vapor phase deposition systems, and a method for transporting a carrier gas saturated with the organometallic compound for delivery into such deposition systems.
Claims9
A vapor-phase delivery apparatus for solid organometallic compounds comprising a dual-chambered vessel having an elongated cylindrical shaped portion having an inner surface, a top closure portion, a bottom closure portion, and inlet and outlet chambers in fluid communication and separated by a porous element, the top closure portion having a fill plug and a gas inlet opening, the fill plug and gas inlet opening communicating with the inlet chamber, an outlet opening communicating with the outlet chamber, the porous element being spaced from the bottom closure portion, the porous element contained in a floor of the inlet chamber, and a frit formed from solid organometallic precursor contained within the inlet chamber.
Dependencies are inferred from the claim text.