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US 2006/0033175 A1Published application
Load lock modules and semiconductor manufacturing apparatuses
OwnerYong-Dae Kiminventor
Life of this patent
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Abstract
A load lock module may include a chamber adapted to receive at least one wafer, a supply tube adapted to supply purging gas into the chamber, an outlet adapted to remove the purging gas from the chamber, and an ejector adapted to provide the purging gas to the surface of the at least one wafer received by the chamber.
Claims20
A load lock module comprising:
- a chamber adapted to receive at least one wafer;
- a supply tube adapted to supply purging gas into the chamber;
- an outlet adapted to remove the purging gas from the chamber;
- and
- an ejector adapted to provide the purging gas, supplied through the supply tube, to the surface of the at least one wafer received by the chamber.
2 more elements
A semiconductor manufacturing apparatus comprising:
- a load port for loading wafers to be handled;
- an equipment front end module attachable to a wafer handling system and adapted to receive wafers to be handled via the load port;
- a process module adapted to process the wafers;
- and
- a load lock module interposed between the process module and the equipment front end module and including,
- a chamber adapted to receive at least one processed wafer,
- a supply tube adapted to supply purging gas into the chamber,
- an outlet adapted to remove the purging gas from the chamber, and
- an ejector adapted to provide the purging gas, supplied through the supply tube, to the surface of the at least one processed wafer received by the chamber.
6 more elements
Dependencies are inferred from the claim text.