Non-volatile memory cell and manufacturing method thereof
AssigneeUnited Microelectronics Corp.
InventorsJung-Ching CHEN, Chuang-Hsin Chueh
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Abstract
A non-volatile memory cell includes a substrate, a first isolation structure positioned in a first region on the substrate, a second isolation structure surrounding a second region on the substrate, a control gate positioned on the first isolation structure in the first region, a first insulating layer positioned on the control gate, a second insulating layer positioned on the portion of the substrate in the second region, and a floating gate positioned on the first insulating layer and the second insulating layer.
Claims20
A non-volatile memory cell, comprising:
- a substrate, the substrate comprising a first region and a second region;
- a plurality of isolation structures positioned on the substrate, the isolation structures comprising a first isolation structure positioned in the first region and a second isolation structure surrounding the second region;
- a control gate positioned on the first isolation structure in the first region;
- a first insulating layer positioned on the control gate;
- a second insulating layer positioned on the portion of the substrate in the second region;
- and
- a floating gate positioned on the first insulating layer and the second insulating layer.
A method of manufacturing a non-volatile memory cell, the method comprising:
- providing a substrate, the substrate comprising a first region and a second region;
- forming a plurality of isolation structures on the substrate, the isolation structures comprising a first isolation structure positioned in the first region and a second isolation structure surrounding the second region;
- forming a control gate on the first isolation structure in the first region;
- forming a first insulating layer on the control gate;
- forming a second insulating layer on the portion of the substrate in the second region;
- and
- forming a floating gate on the first insulating layer and the second insulating layer.
Dependencies are inferred from the claim text.