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AssigneeCanon Kabushiki Kaisha
InventorsSatoshi Okada, Yoshihiro Ogawa, Masato Inoue, Kazumi Nagano, Shinichi Takeda, Tomoyuki Tamura
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A radiation detecting apparatus includes a sensor panel 100, a phosphor layer 111 formed on the sensor panel 100 to convert a radiation into light, and a phosphor protecting member 110 covering the phosphor layer 111 to adhere closely to the phosphor protecting member 110. The phosphor protecting member 110 includes a phosphor protecting layer 116 made of vapor deposition polymerization polyimide formed by vapor deposition polymerization, a reflecting layer 113 reflecting the light converted by the phosphor layer 111, and a protecting layer 117 made of vapor deposition polymerization polyurea formed by the vapor deposition polymerization. By such a configuration, a polymerization reaction of the phosphor protecting layer 116 is performed on the substrate. Thereby, the generation of by-products is suppressed to make it easy to acquire the uniformity of film quality. Consequently, the generation of a situation in which structural disorders are generated on the reflection surface of the reflecting layer 113 to cause image defects can be suppressed.
A radiation detecting apparatus, comprising:
A scintillator panel, comprising:
A manufacturing method of a radiation detecting apparatus, comprising the step of forming a phosphor protecting layer by a vapor deposition polymerization method to cover a phosphor layer formed on a substrate to perform a wavelength conversion of a radiation and to adhere closely to said substrate.
A manufacturing method of a scintillator panel, comprising the step of forming a phosphor protecting layer by a vapor deposition polymerization method to cover a phosphor layer formed on a supporting member to perform wavelength conversion of a radiation, and to adhere closely to said supporting member.
Dependencies are inferred from the claim text.