Sputtering cathode adapter assembly and method

An insulator comprising:

• an annular ring element having a body portion, a top ring portion, and a bottom ring portion;
• the body portion having an inner surface, a top surface coupled to the inner surface, a bottom surface coupled to the inner surface, and an outside surface;
• the top ring portion having an inner surface coupled to the top surface of the body portion, an outer surface coupled to the outer surface of the body portion, and a top surface coupled to the inner surface and the outer surface of the top ring;
• and
• the bottom ring portion having an outer surface coupled to the outer surface of the body portion, a bottom surface coupled to the outer surface, and an inside surface coupled to the bottom surface of the body portion.

A dark space shield comprising:

• a cylindrical element having a body portion and a top ring portion;
• the body portion having an outer surface, a bottom surface coupled to the outer surface by a first shaped surface, an inner surface coupled to the bottom surface, and a top surface coupled to the outer surface;
• and
• the top ring portion having an outer surface coupled to the top surface of the body portion, a top surface coupled to the outer surface, an inner surface coupled to the top surface and to the inner surface of the body portion.

An adapter shield comprising:

• a body portion having rounded edges and rounded corners;
• a top ring having a plurality of four through-holes at 90 degree intervals on a circle of diameter of approximately 12.563 inches, an outside diameter of approximately 12.98 inches and an inside diameter of at least approximately 12.2 inches;
• a bottom ring having an outside diameter of approximately 12.14 inches and an inside diameter of at least approximately 10.85 inches;
• and
• the body portion extending from the outside diameter of the bottom ring to the inside diameter of the top ring and having an axial height selected from the group consisting of approximately 0.53 inches, approximately 1.03 inches, and approximately 1.33 inches.