Reducing electrostatic charge by roughening the susceptor

A substrate support fabricated by a process comprising:

• providing a conductive body having a substrate support surface that is adapted to support a large area substrate;
• and
• coating the substrate support surface, wherein the coating has a surface roughness between about 330 and about 1000 micro-inches.

A substrate support fabricated by the process comprising:

• treating an aluminum substrate support surface adapted to support a large area substrate to obtain a surface finish of about 300 to about 2000 micro-inches;
• and
• anodizing the substrate support surface to a thickness of about 0.3 to about 2.16 mils, wherein the surface finish of the anodized coating disposed at least over the center portion of the substrate support surface has a surface finish of between about 300 and about 2000 micro-inches.

A substrate support adapted to support large area substrates comprising:

• an electrically conductive body having a substrate support surface, wherein the substrate support surface is bare aluminum and has a surface finish between about 140 and about 2000 micro-inches.

A substrate support adapted to support large area substrates comprising:

• an bare aluminum body having a substrate support surface treated to a surface finish of about 80 to about 1000 micro-inches;
• and
• a substrate support structure having one or more supports that are adapted to structurally support the aluminum body during processing.