Polmer-coated particles for chemical mechanical polishing
AssigneeRohm and Haas Electronic Materials CMP Holdings, Inc.
InventorsRichard Partch, Nathaniel Barney, Hongyu Wang, John Quanci
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AssigneeRohm and Haas Electronic Materials CMP Holdings, Inc.
InventorsRichard Partch, Nathaniel Barney, Hongyu Wang, John Quanci
Estimating the term…
The polishing composition is suitable for chemical mechanical polishing magnetic, optical, semiconductor or silicon substrates. The polishing composition includes abrasive particles in a liquid media. The abrasive particles have a particle core, the particle core having a hardness and a polymeric shell physisorbed to and encapsulating the particle core. The polymeric shell has a solid structure and a hardness lower than the hardness of the particle core. The abrasive particles have an average particle size of less than or equal to about 2 micrometers dispersed in the liquid media.
A polishing composition suitable for chemical mechanical polishing magnetic, optical, semiconductor or silicon substrates comprising:
A polishing composition suitable for chemical mechanical polishing magnetic, optical, semiconductor or silicon substrates comprising:
Dependencies are inferred from the claim text.