Multilayer polarization sensor (MPS) for x-ray and extreme ultraviolet radiation

A method of measuring the polarization of x-ray and extreme ultraviolet radiation comprising the steps of:

• directing said radiation at a photodiode with a multiple layer coating with thickness greater than one bilayer;
• selectively transmitting a polarized component of said radiation through said multiple layer coating;
• depositing the polarized component on said photodiode;
• and
• generating an electric current representative of said polarized component.

A multple layer polarization sensor comprising:

• a first photodiode connected to a multiple layer coating with thickness greater than one bilayer;
• said multiple layer coating preferentially transmitting a first polarization component of incident radiation;
• said first photodiode receiving said polarization component to generate an electric current;
• a first meter for receiving said electric current generated by said first photodiode and for measuring said current;
• said multiple layer coating preferentially reflecting a second polarization component of said incident radiation;
• a second multiple layer coating preferentially transmitting a second polarization component of incident radiation;
• a second photodiode receiving said second polarization component to generate an electric current;
• and
• a second meter for receiving said electric current generated by said second photodiode and for measuring said current whereby comparison of currents generated by said first and second meters is a measure of polarization of said incident radiation.