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US 2005/0263605 A1Published application
Method for identifying semiconductor integrated circuit device, method for manufacturing semiconductor integrated circuit device, semiconductor integrated circuit device and semiconductor chip
AssigneesHitachi, Ltd., Hitachi ULSI Systems Co., Ltd.
InventorMasaya Muranaka
Life of this patent
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Abstract
In the manufacturing process of a semiconductor integrated circuit device, a plurality of identification elements having the same arrangement are formed and the relation of magnitude in a physical amount corresponding to variations in the process of the plurality of identification elements is employed as identification information unique to the semiconductor integrated circuit device.
Claims27
A method for identifying a semiconductor integrated circuit device, characterized by:
- providing a semiconductor integrated circuit device with a plurality of identification elements formed to have the same form as one another through the same manufacturing process as one another;
- and
- forming information which reflects a relation of magnitude in a physical amount of said plurality of identification elements to one another, said information being generated corresponding to variations in the physical amount of said plurality of identification elements, and setting the information reflecting the relation of magnitude as unique identification information of the semiconductor integrated circuit device.
27-75. (canceled)
Dependencies are inferred from the claim text.