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US 2005/0239275 A1Published application
Compliant multi-composition interconnects
OwnerSriram Muthukumar, Thomas Doryinventors
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Abstract
A compliant interconnect with two or more layers of metal of two or more compositions with internal stresses is described herein.
Claims20
A compliant interconnect comprising:
- a first metal layer of a first metal composition having a first thickness and a first amount of internal stress;
- and;
- a second metal layer of a second metal composition, stacked on top of the first metal layer, the second metal layer having a second thickness and a second amount of internal stress.
An apparatus comprising:
- a substrate including a metal pad;
- a passivation layer disposed on said substrate, including an opening exposing the metal pad;
- and
- a compliant interconnect disposed on a portion of said substrate and said metal pad, the compliant interconnect having at least a first metal layer of a first metal composition with a first thickness and having a first amount of internal stress, and a second metal layer of a second metal composition, stacked on top of the first layer, with a second thickness and having a second amount of internal stress.
1 more element
A system comprising:
- a component having;
- a substrate including a metal pad;
- a passivation layer disposed on the substrate, including an opening exposing the metal pad;
- a compliant interconnect disposed on a portion of the or passivation layer and the metal pad, the compliant interconnect having at least a first metal layer of a first metal composition with a first thickness and having a first amount of internal stress, and a second metal layer of a second metal composition, stacked on top of the first layer, with a second thickness and having a second amount of internal stress;
- a bus coupled to the component;
- and
- a networking interface coupled to the bus.
4 more elements
A method comprising:
- forming a substrate with a metal pad;
- forming a passivation layer with an opening on top of the substrate, the opening exposing said metal pad;
- and
- forming a compliant interconnect on a portion of the passivation layer and the metal pad, with the compliant interconnect having at least a first metal layer of a first metal composition with a first thickness and having a first amount of internal stress, and a second metal layer of a second metal composition, stacked on top of the first layer, with a second thickness and having a second amount of internal stress.
1 more element
Dependencies are inferred from the claim text.