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US 2005/0233585 A1Published application
Metal nanoline process and applications on growth of aligned nanostructure thereof
AssigneeIndustrial Technology Research Institute
InventorsMing-Jiunn Lai, Jeng-Hua Wei, Hung-Hsiang Wang, Po-Yuan Lo, Ming-Jer Kao
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Abstract
A metal nanoline process and applications on growth of aligned nanostructures thereof. A nano-structure is provided with a substrate with at least one nanodimensional metal catalyst line disposed thereon and at least one carbon nanotube or silicon nanowire extending along an end of the metal catalyst line.
Claims37
A method for forming nanodimensional metal catalyst lines, comprising:
- providing a substrate;
- forming a metal layer of nano-thickness over the substrate;
- forming at least one photoresist pattern over the metal layer;
- removing the metal layer exposed by the photoresist pattern using the photoresist pattern layer as an etching mask, forming at least one metal pattern of nano-thickness on the substrate;
- forming a plurality of metal catalyst lines on sidewalls of the metal pattern by plating, using the photoresist pattern as a mask, wherein the metal pattern and the metal catalyst lines are of nano-thickness;
- removing the photoresist pattern;
- and
- removing the remaining metal layer, leaving the metal catalyst lines of nano-thickness.
5 more elements
A method for forming aligned nano-structures, comprising:
- providing a substrate with at least one metal catalyst nanoline formed thereon;
- forming a sacrificial layer over the substrate and the metal catalyst nanoline;
- forming at least one photoresist pattern over the sacrificial layer, exposing an area of the sacrificial layer for forming nanostructures;
- removing the sacrificial layer and the underlying metal catalyst nanoline exposed by the photoresist pattern to expose a portion of the substrate, wherein at least one cross section of the metal catalyst nanoline is exposed at a margin in the area for forming nanotubes or nanowires;
- removing the photoresist pattern to expose the metal catalyst nanoline;
- forming carbon nanotubes or silicon nanowires from the cross sections of the metal catalyst nanoline and along the length thereof;
- and
- removing the sacrificial layer to leave the silicon nanowires or silicon nanowires on the substrate.
5 more elements
An aligned nanostructure, comprising:
- a substrate;
- at least one nanodimensional metal catalyst line disposed on the substrate;
- and
- at least one carbon nanotube or silicon nanowire extending along an end of the metal catalyst line.
1 more element
Dependencies are inferred from the claim text.