Back to results
US 2005/0229783 A1Published application
Method for purification of lens gases used in photolithography
AssigneeMykrolis Corporation
InventorsDaniel Alvarez, Jeffrey Spiegelman
Life of this patent
Estimating the term…
Loading patent…
Loading patent…
AssigneeMykrolis Corporation
InventorsDaniel Alvarez, Jeffrey Spiegelman
Estimating the term…
A method and composition for the removal of contaminants in a gas stream used in the contamination sensitive processes of photolithography and metrology are described. The synergistic effect of a combination of an electropositive metal component, a high silica zeolite, and a late transition metal compound effects removal or reduction of the contaminates in the gas which interfere with light transmittance to the ppb or ppt levels necessary for the gas to be suitable for these uses. The removal of neutral polar molecules, neutral polar aprotic molecules, protic and aprotic alkaline molecules, acidic polar species, and neutral non-polar aprotic molecules is accomplished with the claimed composition. Depending on the type of contaminant, the composition components are each varied from 10 to 80 parts by volume, with the total composition limited to 100 parts by volume.
A method of decontaminating a gas, wherein said gas comprises one or more of neutral polar protic, neutral polar aprotic, alkaline and polar acidic contaminants, the method comprising removing said contaminants from the gas by passing the gas through a body of decontaminant comprising 10% to 80% by volume an electropositive metal component, 10% to 80% by volume of a late transition metal compound component and 10% to 80% by volume of a high silica zeolite component.
A method of decontaminating a gas, wherein said gas comprises one or more of alkaline, acidic polar, neutral non-polar aprotic and environmental gas contaminants, the method comprising removing said contaminants from the gas by passing the gas through a body of decontaminant comprising 10% to 80% by volume of a electropositive metal component, 10% to 80% by volume of a high silica zeolite component and 10% to 80% by volume of a late transition metal compound component.
Dependencies are inferred from the claim text.