Coupling apparatus for inertial sensors
AssigneeAnalog Devices, Inc.
InventorsJohn Geen, William Clark, Jinbo Kuang
Life of this patent
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Abstract
A coupling apparatus allows anti-phase movements of inertial sensor element frames along parallel axes but substantially prevents in-phase movements of the frames. The coupling apparatus includes a bar coupled between first and second sensor element frames and at least one supporting structure supporting the bar. The at least one structure is coupled to a substrate underlying the frames. The structures allow the bar to rotate at a pivot point when the frames move in anti-phase to one another along substantially parallel axes but substantially prevent in-phase movements of the frames.
Claims18
Apparatus for coupling sensor elements of an inertial sensor, the apparatus comprising:
- a bar coupled between first and second sensor element frames;
- and
- at least one supporting structure supporting the bar, the at least one structure coupled to a substrate underlying the frames, the structures allowing the bar to rotate at a pivot point when the frames move in anti-phase to one another along separate substantially parallel axes but substantially preventing in-phase movements of the frames.
Apparatus for coupling sensor elements of an inertial sensor, the apparatus comprising:
- coupling means for coupling first and second sensor element frames;
- and
- supporting means for supporting the coupling means, the supporting means coupled to a substrate underlying the frames, the supporting means allowing the coupling means to rotate at a pivot point when the frames move in anti-phase to one another along separate substantially parallel axes but substantially preventing in-phase movements of the frames.
Dependencies are inferred from the claim text.