US 2005/0229386 A1Published application

Method for fabricating a thin film magnetic head

AssigneeTDK Corporation

InventorsTaro Oike, Makoto Yoshida, Tetsuo Miyazaki, Shin Narushima, Hiroyuki Miyamoto

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Abstract

A writing magnetic pole portion composed of a first magnetic film and a second magnetic film formed on the first magnetic film via a gap film is fabricated on a given wafer. Then, the writing magnetic pole portion is swung forward and backward around a rotation standard axis parallel to a center line of the writing magnetic pole portion in a direction parallel to a surface of the. Then, the writing magnetic pole portion is milled during the swing of the writing magnetic pole portion to define the width of the writing magnetic pole portion.

Claims14

Dependent claims

A method for fabricating a thin film magnetic head including a writing magnetic pole portion composed of a first magnetic film and a second magnetic film formed on said first magnetic film via a gap layer, comprising the steps of:

fabricating said writing magnetic pole portion on a given wafer,
holding said writing magnetic pole portion for a given period of time forward and backward from a rotation standard axis parallel to a center line of said writing magnetic pole portion in a direction parallel to a surface of said wafer,
rotating said writing magnetic pole portion continuously in one direction around said rotation standard axis in said direction parallel to said surface of said wafer, and
milling said writing magnetic pole portion during the holding and the rotation of said writing magnetic pole portion to define the width of said writing magnetic pole portion.

1 more element

Dependencies are inferred from the claim text.

Facts

Application: 11/150,211Filed 13 Jun 2005
Priority: JP 2001-1675574 Jun 2001
Published: 20 Oct 2005
Term ends: Not estimatedThe source records don’t support an estimate.

Classification14 codes

G11B 5/3116
Details: shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect,…
G11B 5/3163
Using thin films: fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating,…
G11B 5/3133
Disposition of layers: including layers not usually being a part of the electromagnetic transducer structure and providing additional features,…
Y10T 29/49021
Electromagnet, transformer or inductor: magnetic recording reproducing transducer [e.g., tape head, core, etc.]

Family

Application10/153,682Division · filed 24 May 2002
Application11/150,211Division · filed 13 Jun 2005
US 2002/0178573 A1Published application
US 6,920,685 B2Related patent
US 7,197,814 B2Related patent
US 2005/0229386 A1This patent

From the US filing history. Foreign family members aren’t listed.

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