Performance in model-based OPC engine utilizing efficient polygon pinning method

A method of performing model-based optical proximity correction comprising:

• providing a mask matrix having a region of interest (ROI) with a boundary;
• locating a plurality of points of interest within said mask matrix;
• computing a first single loop polygon having a plurality of vertices representative of said located plurality of points of interest;
• pinning selected ones of said plurality of vertices of said first single loop polygon to said boundary of said ROI to form a second single loop polygon on said ROI, said selected ones of said plurality of vertices being pinned to said ROI based on a spatial relation of said selected ones of said plurality of vertices with said ROI;
• and
• correcting for optical proximity using said second single loop polygon.

A program storage device readable by a machine, tangibly embodying a program of instructions executable by the machine to perform method steps for performing model-based optical proximity correction, said method steps comprising:

• providing a mask matrix having a region of interest (ROI) with a boundary;
• locating a plurality of points of interest within said mask matrix;
• determining a first single loop finite geometrical shape having a plurality of vertices representative of said located plurality of points of interest;
• and
• collapsing said first single loop finite geometrical shape onto said ROI to correct for optical proximity.