Method for manufacturing piezo-resonator

A method for manufacturing a piezo-resonator for obtaining a signal having a specified resonant frequency by using a lower electrode formed on a substrate and an upper electrode formed on a side opposite to said lower electrode with a piezoelectric film being interposed between said lower electrode and said upper electrode, said method comprising:

• a first step of coating said piezoelectric film with a resist;
• a second step of performing patterning on said resist so that said piezoelectric film is exposed in a manner to form a shape of said upper electrode;
• a third step of forming an upper electrode layer on the patterned resist and on the exposed piezoelectric film;
• a fourth step of removing said resist together with said upper electrode layer formed on an upper surface of said resist and forming two or more first upper electrodes on said piezoelectric layer;
• a fifth step of coating said first upper electrodes with a resist and performing patterning on said resist so that said first upper electrodes are partially exposed;
• a sixth step of etching each of the exposed first upper electrodes by a specified thickness to form a second upper electrode;
• and
• a seventh step of removing said resist.