US 2005/0089699 A1 · Cleaning and refurbishing chamber components having metal coatings

Abstract

A component of a process chamber is refurbished and cleaned to remove an intermetallic compound from the component. The component has a structure having a coating that includes a first metal layer over the intermetallic compound. To refurbish the component, the first metal layer is removed to form an exposed surface that at least partially includes the intermetallic compound. The exposed surface is bead blasted in a penetrative bead blasting step by propelling blasting beads having a bead diameter of less than about 180 micrometers with a gas that is pressurized to a pressure of less than about 310 kPa (45 psi), towards the exposed surface, thereby removing the intermetallic compound from the exposed surface of the structure to form a cleaned surface. A second metal layer is then formed over the cleaned surface.

Claims19

Dependent claims

A method of refurbishing a component of a process chamber, the component comprising a structure having a coating comprising a first metal layer over an intermetallic compound, the method comprising:

(a) removing the first metal layer to form an exposed surface that at least partially comprises the intermetallic compound;
(b) performing a penetrative bead blasting step by propelling blasting beads having a bead diameter of less than about 180 micrometers with a gas that is pressurized to a pressure of less than about 310 kPa towards the exposed surface, thereby removing the intermetallic compound from the exposed surface of the structure to form a cleaned surface;
and
(c) forming a second metal layer over the cleaned surface.

1 more element

A method of refurbishing a component of a process chamber, the component comprising a structure having a coating comprising a first metal layer over an intermetallic compound, the method comprising:

(a) immersing a surface of the first metal layer in a cleaning solution to remove the first metal layer from the structure, thereby forming an exposed surface that at least partially comprises the intermetallic compound;
(b) performing a penetrative bead blasting step by propelling blasting beads having a bead diameter of less than about 180 micrometers with a gas that is pressurized to a pressure of less than about 310 kPa towards the exposed surface, thereby removing the intermetallic compound from the exposed surface;
(c) performing a texturizing bead blasting step by propelling blasting beads having a bead diameter of greater than about 400 micrometers with a gas that is pressurized to a pressure of at least about 276 kPa towards the exposed surface, thereby forming a textured surface having a surface roughness average of from about 3.81 micrometers to about 8.89 micrometers;
and
(d) twin-wire arc spraying a second metal layer over the textured surface.

2 more elements

Dependencies are inferred from the claim text.

Cleaning and refurbishing chamber components having metal coatings

Life of this patent

Cleaning and refurbishing chamber components having metal coatings

Life of this patent

Abstract

Claims19